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US 2026/0086466 A1Published application
Lithographic apparatus and method
AssigneeASML Netherlands B.V.
InventorsKoos VAN BERKEL, Martinus Hendrikus Antonius LEENDERS
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Abstract
A lithographic apparatus including a reflector for reflecting radiation. The reflector has a body, a reflective surface arranged on the body, and a channel formed in the body for conveying a fluid. The lithographic apparatus includes a controller configured to adjust a pressure of the fluid in the channel to control a deformation of the reflective surface and thereby control an overlay of the lithographic apparatus.
Claims20
A lithographic apparatus comprising:
- a reflector configured to reflect radiation, the reflector comprising:
- a body,
- a reflective surface arranged on the body, and
- a channel formed in the body for conveying a fluid;
- and
- a controller configured to adjust a pressure of the fluid in the channel to control a deformation of the reflective surface to control an overlay of the lithographic apparatus.
3 more elements
A method comprising:
- providing a flow of fluid through a channel formed in a body on which a reflective surface of a lithographic apparatus is arranged;
- adjusting a pressure of the fluid to control a deformation of the reflective surface to control an overlay of the lithographic apparatus;
- and reflecting radiation from the reflective surface.
Dependencies are inferred from the claim text.