Semiconductor device and fabricating method thereof

A method, comprising:

• forming a substrate;
• forming an oxide portion above the substrate;
• forming a first doped portion, a second doped portion, a third doped portion and a fourth doped portion above the oxide portion and arranged along a first direction in order;
• and
• forming a first waveguide portion and a second waveguide portion above the oxide portion and split from each other along the first direction,
• wherein the first waveguide portion is coupled to each of the first doped portion and the second doped portion,
• the second waveguide portion is coupled to each of the third doped portion and the fourth doped portion,
• each of the first doped portion and the fourth doped portion has a first conductive type, and
• each of the second doped portion and the third doped portion has a second conductive type different from the first conductive type.

A semiconductor device, comprising:

• a resonator configured modulate an optical light to generate a first modulated light;
• and
• a waveguide structure configured to transmit the optical light to the resonator, and configured to output the first modulated light,
• wherein the resonator comprises:
• at least one first converter structure configured to modulate the optical light to generate a second modulated light;
• and
• at least one second converter structure configured to modulate the second modulated light to generate the first modulated light.