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US 2026/0086397 A1Published application
Optical waveguide element, optical modulator, and optical transmission apparatus
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorKosuke Okahashi
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Abstract
An optical waveguide element 1 according to the disclosure includes: a substrate 10 including electro-optic crystal and forming an optical waveguide 80; an electrode 60 placed on the substrate 10; an electrode underlayer 50 disposed in contact with a lower surface of the electrode 60; and an oxygen deficiency prevention layer 40 disposed in contact with at least a part of a lower surface of the electrode underlayer 50 and at least a part of an upper surface (substrate upper surface 10a) of the substrate 10, and preventing oxygen deficiency of the substrate 10.
Claims14
An optical waveguide element, comprising:
- a substrate comprising electro-optic crystal and forming an optical waveguide;
- an electrode placed on the substrate;
- an electrode underlayer disposed in contact with a lower surface of the electrode;
- and
- an oxygen deficiency prevention layer disposed in contact with at least a part of a lower surface of the electrode underlayer and at least a part of an upper surface of the substrate, and preventing oxygen deficiency of the substrate due to the electrode underlayer.
2 more elements
Dependencies are inferred from the claim text.