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US 2026/0086349 A1Published application
Systems and Apparatus for Micromirror Designs with Electrode Contact
OwnerWilliam Craig MCDONALD, Ryan Patrick SAVAGEinventors
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Abstract
Systems and Apparatus for micromirror designs with electrode contact. In some examples, a device element includes a top layer. The device element also includes a middle layer under the top layer, the middle layer including a springtip. Additionally, the device element includes an electrode having a dielectric layer, the dielectric layer configured to contact the springtip.
Claims20
A device element comprising:
- a top layer;
- a middle layer under the top layer, the middle layer comprising a springtip;
- and
- an electrode having a dielectric layer, the dielectric layer configured to contact the springtip.
1 more element
A device element comprising:
- a top layer having a dielectric coating;
- an electrode;
- and
- a springtip configured to contact the dielectric coating of the of the top layer, the springtip coupled to the electrode.
1 more element
A system comprising:
- a microelectromechanical systems (MEMS) device element comprising a movable element;
- and
- a driver coupled to the MEMS device element, the driver configured to:
- provide a first series of voltages associated with a first position of the movable element;
- and
- provide a second series of voltages associated with a second position of the movable element, wherein the second series of voltages comprises a first voltage having a first polarity and a second voltage having a second polarity different than the first polarity.
3 more elements
Dependencies are inferred from the claim text.