Method for producing an optical element, optical element and coating arrangement

A method for producing an optical element in a coating process carried out in a coating arrangement, comprising:

• supplying at least one substrate with coating material from at least one source for depositing a layer system on the at least one substrate, wherein said depositing comprises:
• forming a plurality of zones that are laterally adjacent to one another in at least one predefined direction, each zone having a defined layer thickness profile and a defined layer composition, by targeted spatially resolved selection and/or treatment of the deposited coating material and/or the at least one substrate, during the producing of the optical element, wherein the zones differ from one another in the layer thickness profile and/or the layer composition;
• wherein the zones each range in average dimension in the predefined direction from 0.1 mm to 2 cm;
• wherein the optical element produced is a mirror array with a plurality of mirror elements;
• and
• generating, for further substrates of further mirror elements of the mirror array, mutually different layer thickness profiles and/or layer compositions for the deposited layer system.