Ion sensing with deep trench isolation inductors

A method, comprising:

• sensing an ionized fluid via a sense electrode;
• charging a first deep trench inductor via the sense electrode based on the sensing an ionized fluid, wherein the first deep trench inductor comprises a conductor in a dielectric in a deep trench in a substrate;
• measuring a change in quality factor or inductance of the first deep trench inductor;
• and
• outputting a fluid property signal corresponding to the measured change in quality factor or inductance of the first deep trench inductor.

A fluid property sensor made by a process comprising:

• etching a first deep trench in a substrate, the first deep trench having a shape of a coil;
• filling the first deep trench with a dielectric;
• placing a first conductor within the dielectric in the first deep trench, wherein the first conductor forms a first deep trench inductor;
• configuring a sense electrode to electrically communicate with the first deep trench inductor and configuring the sense electrode to become electrically charged when exposed to an ionized fluid;
• and
• configuring a fluid property measurement circuit to measure a quality factor or inductance of the first deep trench inductor and output a fluid property signal.