Defect detection devices and method for detecting defects

A defect detection device, comprising:

• a light source configured to illuminate a wafer including a plurality of dies;
• a camera configured to capture a first image of at least one die of the plurality of dies;
• and
• an electronic device configured:
• to provide configuration settings that include at least one of a pixel size, a wavelength, an aperture, a polarization, or a scan speed;
• to control the camera and the light source to capture the first image of the at least one die based on the configuration settings;
• to receive information about a defect image and a reference image of the at least one die from the camera;
• to convert the defect image and the reference image into a defect phase image and a reference phase image, respectively, through a phase enhanced algorithm;
• to generate a phase enhanced image based on the defect phase image and the reference phase image;
• and
• to control the camera and the light source to capture a second image of another one of the plurality of dies based on the configuration settings if a defective signal indicative of a defect in the at least one die is detected in the phase enhanced image.

A defect detection device for detecting a defect in a die, comprising:

• a storage device configured to store a defect image and a reference image;
• an electronic device configured to perform a zero padding on the defect image and the reference image that has a same focus offset as the defect image, and to convert the defect image and the reference image into a defect phase image and a reference phase image, respectively, using a phase enhanced algorithm;
• and
• a camera configured to capture images of the die by adjusting a focus offset of a lens responsive to one or more operations of the electronic device.