Microscope-based system and method of determining beam processing path

Abstract

A microscope-based system is provided. The microscope-based system includes an illumination assembly comprising an illumination light source and a pattern illumination device, and a processing module coupled to the illumination light source and the pattern illumination device. The processing module is configured to identify regions of interest in a sample to generate a two-dimensional illumination mask for each of the multiple fields of view, and for each field of view, determine an illumination sequence of the regions of interest by minimizing a sum of a plurality of region-to-region traveling distances between sequential regions of interest, determine an illumination path following the illumination sequence within each of the regions of interest, and control the illumination light source and the pattern illumination device to illuminate the regions of interest based on the illumination sequence and the illumination path for each of the multiple fields of view. Methods of use are also provided.

Dependencies are inferred from the claim text.