Sensor element and method of manufacturing a sensor element

A sensor element for measuring a temperature, comprising

• at least one carrier with a top side and a bottom side;
• an electrically insulating layer formed on the top side of the carrier;
• at least one functional layer comprising a material with a temperature-dependent electrical resistance, the at least one functional layer being arranged on the electrically insulating layer;
• at least first and second electrodes formed on the carrier at a distance from one another, each of the first and second electrodes having a plurality of electrode fingers, the electrode fingers of the first and second electrodes being arranged alternately with respect to one another;
• at least first and second contact pads for electrically contacting the sensor element, the first contact pad being arranged directly on a partial region of the first electrode, the second contact pad being arranged directly on a partial region of the second electrode;
• and
• wherein the sensor element is designed to be integrated directly into an electrical system as a discrete component, wherein the sensor element has a narrow resistance tolerance, and wherein the at least one functional layer and/or at least one of the first and second electrodes are structured for adjusting a resistance value of the sensor element.

A method of manufacturing a sensor element comprising the following acts:

• A) providing a carrier material with an insulating layer for forming a carrier;
• B) forming at least two electrodes on the carrier, the respective electrode having a plurality of electrode fingers, the electrode fingers of the two electrodes being arranged alternately with respect to one another;
• C) applying a functional material to a partial area of the electrodes to form a functional layer;
• D) affecting the functional layer with temperature treatment;
• and
• E) adjusting a resistance value of the sensor element by trimming at least a partial area of the electrodes and/or of the functional layer by means of a laser.