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US 2026/0085221 A1Published application
Cmp composition including alcohol amine molybdenum etch inhibitor
AssigneeEntegris, Inc.
InventorsWei-Hsin Hsu, Cheng-Yuan Ko
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Abstract
A chemical mechanical polishing composition comprises, consists of, or consists essentially of a liquid carrier, colloidal silica particles dispersed in the liquid carrier, an iron-containing polishing accelerator; a stabilizer bound to the iron-containing polishing accelerator; an alcohol amine compound including at least three alcohol groups and at least two amine groups; and a pH of less than about 4.
Claims20
A chemical mechanical polishing composition comprising:
- a liquid carrier;
- abrasive particles dispersed in the liquid carrier;
- an iron-containing polishing accelerator;
- a stabilizer bound to the iron-containing polishing accelerator;
- an alcohol amine compound including at least three alcohol groups and at least two amine groups;
- and
- a pH of less than about 4.
4 more elements
A chemical mechanical polishing composition comprising:
- a liquid carrier;
- abrasive particles dispersed in the liquid carrier;
- an iron-containing polishing accelerator;
- a stabilizer bound to the iron-containing polishing accelerator;
- polylysine;
- and
- N,N,N′,N′-tetrakis (2-hydroxyethyl)ethylenediamine.
4 more elements
A method of chemical mechanical polishing a substrate, the method comprising:
- (a) contacting the substrate with a polishing composition including a liquid carrier, abrasive particles dispersed in the liquid carrier, an iron-containing polishing accelerator, a stabilizer bound to the iron-containing polishing accelerator, an alcohol amine compound including at least three alcohol groups and at least two amine groups, and having a pH of less than about 4;
- (b) moving the polishing composition relative to the substrate;
- and
- (c) abrading the substrate to remove a portion of at least one molybdenum layer or at least one tungsten layer from the substrate and thereby polish the substrate.
1 more element
Dependencies are inferred from the claim text.