Polishing surface dressing method and method of manufacturing substrate

A polishing surface dressing method comprising dressing a polishing surface of a polishing pad of a polishing apparatus by a dressing section of a dressing mechanism,

• the polishing apparatus including:
• a holding table which is rotatable and holds a workpiece;
• the polishing pad which is rotatable and has the polishing surface provided to oppose a holding surface of the holding table;
• the dressing mechanism which is configured to make contact with the polishing surface and dress the polishing surface;
• a first direction movement mechanism which is configured to move the dressing section of the dressing mechanism in a first direction that is orthogonal to the polishing surface;
• a second direction movement mechanism which is configured to move at least one of the dressing section or the polishing pad in a second direction parallel to the polishing surface;
• and a displacement measuring unit which is configured to measure a displacement amount in the first direction of the dressing section,
• the dressing the polishing surface by the dressing section including:
• a dressing step of dressing the polishing surface by moving the dressing section along the polishing surface by the second direction movement mechanism while causing the dressing section to be in contact with the polishing surface by the first direction movement mechanism;
• a polishing surface shape measuring step of measuring the shape of the polishing surface based on the displacement amount in the first direction and a movement position in the second direction of the dressing section that is in contact with the polishing surface;
• a determination step of determining appropriateness of the shape of the polishing surface measured in the polishing surface shape measuring step;
• and
• a condition change step of changing a contact condition in which the dressing section makes contact with the polishing surface in the dressing step, when the shape of the polishing surface is determined to be “No Good”,
• the dressing step being performed based on the contact condition changed in the condition change step.