Laser processing apparatus and method of manufacturing display device using the same
AssigneeSamsung Display Co., Ltd.
InventorSUKBONG LEE
Life of this patent
Estimating the term…
Abstract
A laser processing apparatus includes: a stage on which a display substrate having a display area and a carrier substrate are loaded; a light source part that irradiates a laser to the carrier substrate; and a refractive optical system that refracts the laser. The laser includes a first laser that passes through the refractive optical system and a second laser that bypasses the refractive optical system. The first laser and the second laser are incident at a boundary between the display substrate and the carrier substrate, and the second laser is incident at the display area of the display substrate.
Claims20
A laser processing apparatus, the apparatus comprising:
- a stage on which a display substrate having a display area and a carrier substrate are loaded;
- a light source part that irradiates a laser to the carrier substrate;
- and
- a refractive optical system that refracts the laser,
- wherein the laser includes a first laser that passes through the refractive optical system and a second laser that bypasses the refractive optical system,
- wherein the first laser and the second laser are incident at a boundary between the display substrate and the carrier substrate, and
- wherein the second laser is incident at the display area of the display substrate.
A method of manufacturing a display device, the method comprising:
- forming a display substrate having a display area on a first surface of a carrier substrate;
- forming a light emitting element in the display area on the display substrate;
- and
- peeling off the display substrate and the carrier substrate by irradiating a laser to the carrier substrate,
- wherein a first intensity of the laser incident at the display area of the display substrate is different from a second intensity of the laser incident at a boundary between the display substrate and the carrier substrate.
Dependencies are inferred from the claim text.