Fluid supply mechanism and fluid supply method
AssigneeHORIBA STEC, Co., Ltd.
InventorsHidetaka YADA, Keisuke NISHIWAKI
Life of this patent
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Abstract
A fluid supply mechanism 100 that repeats supply and stop of a fluid to a chamber CH, includes: a fluid supply path L1 communicating with the chamber CH; a tank T provided in the fluid supply path L1 and into which the fluid is introduced; and a downstream-side valve Vd provided at a downstream side of the tank T in the fluid supply path L1, in which an internal volume of the tank T changes due to deformation of the tank T.
Claims11
A fluid supply mechanism that repeats supply and stop of a fluid to a chamber, the fluid supply mechanism comprising:
- a fluid supply path communicating with the chamber;
- a tank provided in the fluid supply path and into which the fluid is introduced;
- and
- a downstream-side valve provided at a downstream side of the tank in the fluid supply path,
- wherein an internal volume of the tank changes due to deformation of the tank.
A fluid supply method using a fluid supply mechanism that repeats supply and stop of a fluid to a chamber, the fluid supply mechanism including:
- a fluid supply path communicating with the chamber;
- a tank provided in the fluid supply path and into which the fluid is introduced;
- and
- a downstream-side valve provided at a downstream side of the tank in the fluid supply path, the fluid supply method comprising
- changing an internal volume of the tank by deforming the tank.
A fluid supply mechanism comprising:
- a plurality of fluid supply paths communicating with a chamber and connected in parallel to each other;
- a tank provided in each of the plurality of fluid supply paths and into which a fluid is introduced;
- and
- a downstream-side valve provided at a downstream side of the tank in each of the plurality of fluid supply paths,
- wherein an internal volume of the tank changes due to deformation of the tank.
Dependencies are inferred from the claim text.