Electronic device, deposition apparatus and method for manufacturing display device by using the same
AssigneeSamsung Display Co., Ltd.
InventorsMUN SEONG JANG, MINSEOK KIM, SUNGYONG KO
Life of this patent
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Abstract
Disclosed is a deposition apparatus including a first electrostatic chuck configured to suction a support plate defining a pass hole, the first electrostatic chuck including a base part, and a suction part on the base part, the suction part defining a first recess for overlapping the pass hole, and second recesses spaced apart from the first recess, and having diameters that are less than a diameter of the first recess.
Claims20
A deposition apparatus comprising:
- a first electrostatic chuck configured to suction a support plate defining a pass hole, the first electrostatic chuck comprising:
- a base part;
- and
- a suction part on the base part, the suction part defining:
- a first recess for overlapping the pass hole;
- and
- second recesses spaced apart from the first recess, and having diameters that are less than a diameter of the first recess.
A method for manufacturing a display device, the method comprising:
- positioning, in a chamber, a first electrostatic chuck comprising a base part, and a suction part on the base part and defining a first recess and second recesses, diameters of the second recesses being less than a diameter of the first recess, for suctioning a support plate defining a pass hole overlapping the first recess;
- positioning, in the chamber, a second electrostatic chuck for suctioning a display panel having a main display area, and a component area having a transmittance that is higher than that of the main display area, the first electrostatic chuck and the second electrostatic chuck facing each other;
- vacuuming an interior of the chamber;
- combining the display panel and the support plate such that the component area overlaps the pass hole;
- stopping an operation of the first electrostatic chuck;
- and
- spacing the support plate apart from the first electrostatic chuck.
An electronic device for providing an image, and comprising a display device manufactured by:
- positioning, in a chamber:
- a first electrostatic chuck comprising a base part, and a suction part defining a first recess and second recesses having diameters that are less than that of the first recess on the base part, for suctioning a support plate defining a pass hole to overlap the first recess;
- and
- a second electrostatic chuck for suctioning a display panel having a main display area, and a component area having a transmittance that is higher than that of the main display area, the first electrostatic chuck and the second electrostatic chuck facing each other;
- vacuuming an interior of the chamber;
- combining the display panel and the support plate such that the component area overlaps the pass hole;
- stopping an operation of the first electrostatic chuck;
- and
- spacing the support plate apart from the first electrostatic chuck.
Dependencies are inferred from the claim text.