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AssigneeSilith Technology (Suzhou) Co., Ltd.
InventorsXingyu ZHANG, Ke ZHANG
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Provided in the present invention is a thermo-optic phase shifter array, including at least one first waveguide and at least one second waveguide, where the first waveguide extends in a first direction, the second waveguide extends in a second direction, the first waveguides and the second waveguides are alternately arranged in a third direction, the first waveguide includes a first waveguide section, the second waveguide includes a second waveguide section, the first waveguide sections and the second waveguide sections are alternately arranged in the third direction, the first waveguide section is integrated with a heater, and a thermo-optic coefficient of the second waveguide section is smaller than that of the first waveguide sections. The thermo-optic phase shifter array provided by the present invention has lower thermal crosstalk, and has a compact structure, facilitating high-density integration. The present invention further provides an interferometer array and an optical phased array.
A thermo-optic phase shifter array, comprising at least one first waveguide and at least one second waveguide, wherein the first waveguide extends in a first direction, the second waveguide extends in a second direction, the first waveguides and the second waveguides are alternately arranged in a third direction, the first waveguide comprises a first waveguide section, the second waveguide comprises a second waveguide section, the first waveguide sections and the second waveguide sections are alternately arranged in the third direction, the first waveguide section is integrated with a heater, and a thermo-optic coefficient of the second waveguide section is smaller than that of the first waveguide section.
Dependencies are inferred from the claim text.