Tunable fiber scanner for all-fiber nonlinear microspectrometer and preparation method thereof

A preparation method of the tunable fiber scanner for an all-fiber nonlinear microspectrometer, comprising:

• Step 1:
• embedding rubber into plastic clay, exposing edges of right angles of the rubber, evenly applying a small amount of epoxy resin glue on the edges of the two micro piezoelectric ceramic chips (31,32,33,34), then adding the amount of the glue to the edges where the micro piezoelectric ceramic chips are connected, and fixing for 24 hours to form a stable L-shaped structure;
• Step 2:
• placing the L-shaped structure in a groove of a glass mold, one micro piezoelectric ceramic chip of the L-shaped structure is tightly attached to the glass of the glass mold (12), the other micro piezoelectric ceramic chip is above the groove;
• placing a fiber ferrule (4) under the L-shaped structure, tightly attached to the glass, and supporting the L-shaped structure;
• evenly applying epoxy resin glue on the edges of a third micro piezoelectric ceramic chip and placing the third micro piezoelectric ceramic chip on the other side of the L-shaped structure, tightly attaching to the fiber ferrule (4) and the micro piezoelectric ceramic chip located on the top, and fixing for 24 hours to form a U-shaped groove;
• Step 3:
• cutting after peeling off a coating at one end of a scanning fiber (2), so as to ensure the smoothness of an end of an optical fiber cantilever (22);
• inserting the scanning fiber into the fiber ferrule (4) to a specific cantilever length;
• placing the fiber ferrule (4) with the scanning fiber (2) in the upside-down U-shaped groove, and fixing the fiber ferrule (4) and U-shaped groove by epoxy resin glue;
• placing a fourth micro piezoelectric ceramic chip onto the top of the U-shaped groove, evenly applying epoxy resin glue on the edges of the fourth micro piezoelectric ceramic chip to fix the fourth micro piezoelectric ceramic chip and the U-shaped groove, and fixing for 24 hours to form a stable micro scanning square tube (3);
• Step 4:
• fixing a cylindrical nut (15) at the rear end of the micro scanning square tube (3) by the epoxy resin glue, penetrating the scanning fiber through the micro scanning square tube (3), and configuring a screw to construct a spiral regulator (5);
• fixing a fixing collar (7) at the tail end of the micro scanning square tube (3) by the epoxy resin glue, a certain space is reserved to lead out a wire;
• and fixing a packaging sleeve (8) and the fixing collar (7) to ensure that a 0-scale marking position on the outer wall of the packaging sleeve (8) is capable of aligning with the marking position of the spiral regulator (5) when the screw is screwed tightly and the optical fiber cantilever reached maximum length, so as to form a four-piece assembled tunable piezoelectric-driven fiber scanner.