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US 2026/0077394 A1Published application
Cleaning sheet, transfer member provided with cleaning function, and method of producing cleaning sheet
AssigneeNitto Denko Corporation
InventorYuichi FUKAMICHI
Life of this patent
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Abstract
Provided is a cleaning sheet excellent in cleanliness, foreign particle-removing performance, and transfer performance. The cleaning sheet includes a cleaning layer. The cleaning layer contains a polyimide-based resin. The cleaning layer has an amount of a metal transferred to a silicon wafer of 1×1011 atoms/cm2 or less, which is measured by a total reflection X-ray fluorescence analysis method.
Claims9
A cleaning sheet, comprising a cleaning layer,
- wherein the cleaning layer contains a polyimide-based resin, and
- wherein the cleaning layer has an amount of a metal transferred to a silicon wafer of 1×1011 atoms/cm2 or less, which is measured by a total reflection X-ray fluorescence analysis method.
A method of producing a cleaning sheet, comprising applying a composition for forming a cleaning layer to a support,
- wherein a Na concentration and a Ca concentration in the composition for forming a cleaning layer are each 10 ppm or less.
Dependencies are inferred from the claim text.