Die flip bonding device and semiconductor package manufacturing method
AssigneeSamsung Electronics Co., Ltd.
InventorsHeesung PARK, Youngkyu BAE, Minwoo SONG, Jongho LEE, Hyunmin JEON
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AssigneeSamsung Electronics Co., Ltd.
InventorsHeesung PARK, Youngkyu BAE, Minwoo SONG, Jongho LEE, Hyunmin JEON
Estimating the term…
A die flip bonding device includes a substrate holder configured to provide a substrate including a plurality of die stacks having a gap in a first direction, the plurality of die stacks being wire-bonded; a first moving body configured to move to a first position to pick up a first uppermost die of a first die stack, among the plurality of die stacks, and then half-flip the first uppermost die in the first direction to move the first uppermost die to a second position; and a second moving body configured to move to the second position to receive the first uppermost die of the first die stack from the first moving body, and after the movement of the first moving body, half-flip the first uppermost die of the first die stack in the first direction at the second position to move the first uppermost die to a third position.
A die flip bonding device comprising:
A die flip bonding device for flipping and stacking an uppermost die of at least one die stack onto an uppermost die of an adjacent die stack, in a plurality of die stacks in which a substrate is connected to a plurality of dies stacked on the substrate by wire-bonding, comprising:
Dependencies are inferred from the claim text.