Backside dual dielectric fill for better thermal conductivity
AssigneeInternational Business Machines Corporation
InventorsSarabjot Singh, Tao Li, Ruilong Xie, Qianwen Chen, Joshua M. Rubin
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AssigneeInternational Business Machines Corporation
InventorsSarabjot Singh, Tao Li, Ruilong Xie, Qianwen Chen, Joshua M. Rubin
Estimating the term…
According to the embodiment of the present invention, a semiconductor device comprises a first nanodevice including a plurality of first transistors. The first nanodevice includes a first placeholder. A backside interlayer dielectric (BILD) layer is in direct contact with a first portion of sidewalls of the first placeholder. The BILD layer is comprised of a first dielectric material. A backside thermal dissipation dielectric is in direct contact with a backside surface of the BILD layer. The backside thermal dissipation dielectric is comprised of a second dielectric material.
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.