Managing isolating structures in semiconductor devices
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsJianlan WEI, Zongliang HUO, Chao YAN, Jing GAO, Sizhe LI, Xiaoming MAO, Tingting ZHAO
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsJianlan WEI, Zongliang HUO, Chao YAN, Jing GAO, Sizhe LI, Xiaoming MAO, Tingting ZHAO
Estimating the term…
The present disclosure relates to methods, devices, and systems for managing isolating structures in semiconductor devices. An example semiconductor device includes a first stack of conductive layers and isolating layers extending along a first direction and alternating with each other along a second direction perpendicular to the first direction. The semiconductor device further includes a gate line slit structure extending through the first stack along the second direction, and a first isolating structure extending along the first direction. The first isolating structure includes a first portion in the first stack and a second portion in the gate line slit structure. A size of the first portion is greater than a size of the second portion along the second direction.
A semiconductor device, comprising:
A semiconductor device, comprising:
A method of forming a semiconductor device, comprising:
Dependencies are inferred from the claim text.