Temperature measurement wafer and substrate processing system using the same

Abstract

A temperature measurement wafer includes a temperature sensor, a transmission unit, and a battery substrate. The transmission unit wirelessly transmits temperature data of a temperature measurement subject measured by the temperature sensor to the temperature measurement wafer. That is, the temperature measurement wafer wirelessly transmits information to the outside, a decrease in operation efficiency caused by a communication wire can be avoided. The battery substrate supplies power to each of the temperature sensor and the transmission unit using an all-solid-state secondary battery. Using the all-solid-state secondary battery makes it possible to operate the temperature measurement wafer without deteriorating its performance even under a higher temperature condition. Thus, the temperature measurement wafer can be used under a higher temperature condition while improving the operation efficiency of the temperature measurement wafer.

Dependencies are inferred from the claim text.