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AssigneeKokusai Electric Corporation
InventorKaoru YAMAMOTO
Estimating the term…
There is provided a technique that includes: an atmospheric transfer structure configured to transfer a substrate in an atmospheric atmosphere; a plurality of processing structures arranged along the atmospheric transfer structure and configured to be capable of processing the substrate in a vacuum atmosphere; an intermediate structure arranged adjacent to the plurality of processing structures, and configured to receive the substrate from the atmospheric transfer structure and to transfer the substrate to each of the plurality of processing structures in an atmosphere whose pressure is lower than that of the atmospheric atmosphere.
A substrate processing apparatus comprising:
A substrate processing method comprising:
A non-transitory computer-readable recording medium storing a program that causes a substrate processing apparatus, by a computer, to perform:
Dependencies are inferred from the claim text.