Vacuum hole cleaning apparatus, stage including the same, and substrate treatment apparatus including the vacuum hole cleaning apparatus

A stage comprising:

• a substrate support body including a substrate holding surface, the substrate support body being configured to mount a substrate thereon, the substrate holding surface having a plurality of vacuum holes;
• a vacuum pressure forming apparatus configured to form vacuum pressure in the plurality of vacuum holes;
• and
• a vacuum hole cleaning apparatus configured to clean the plurality of vacuum holes,
• wherein the vacuum hole cleaning apparatus includes:
• a hole opening/closing apparatus configured to open and close selected ones of the plurality of the vacuum holes, and the hole opening/closing apparatus being detachably attachable to the substrate holding surface;
• and
• a cleaning fluid supply configured to supply cleaning fluid to the stage to spray cleaning fluid through the vacuum holes,
• wherein the hole opening/closing apparatus includes:
• a first side surface that is adjacent to the substrate holding surface when the hole opening/closing apparatus is attached to the substrate holding surface;
• and
• a second side surface facing in an opposite direction to the first side surface,
• wherein an open area of the hole opening/closing apparatus corresponding to opening target holes of the plurality of vacuum holes, is opened between the first side surface and the second side surface.

A substrate treatment apparatus comprising:

• a stage configured to support a substrate;
• and
• a polishing apparatus configured to polish the substrate,
• wherein the stage includes:
• a substrate support body including a substrate holding surface, the substrate support body being configured to mount a substrate thereon, the substrate holding surface including a plurality of vacuum holes therein;
• a vacuum pressure forming apparatus configured to form vacuum pressure in the plurality of vacuum holes;
• and
• a vacuum hole cleaning apparatus configured to clean the plurality of vacuum holes,
• wherein the vacuum hole cleaning apparatus includes:
• a hole opening/closing apparatus configured to open and close selected ones of the plurality of vacuum holes, and the hole opening/closing apparatus being detachably attachable to the substrate holding surface;
• and
• a cleaning fluid supply configured to supply cleaning fluid to the stage to spray cleaning fluid through the vacuum holes,
• wherein the hole opening/closing apparatus includes:
• a first side surface that is adjacent to the substrate holding surface when the hole opening/closing apparatus is attached to the substrate holding surface;
• and
• a second side surface facing in an opposite direction to the first side surface,
• wherein an open area of the hole opening/closing apparatus corresponding to opening target holes of the plurality of vacuum holes, is opened between the first side surface and the second side surface.