Magnetoresistive random access memory and method for fabricating the same
AssigneeUnited Microelectronics Corp.
InventorsHui-Lin Wang, Hsiang-Chi Chien, Che-Wei Chang, Chen-Yi Weng
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AssigneeUnited Microelectronics Corp.
InventorsHui-Lin Wang, Hsiang-Chi Chien, Che-Wei Chang, Chen-Yi Weng
Estimating the term…
A method for fabricating a magnetoresistive random access memory (MRAM) device includes the steps of first forming an inter-metal dielectric (IMD) layer on a substrate, forming a first metal interconnection and a second metal interconnection in the IMD layer, forming a spin orbit torque (SOT) layer on the first metal interconnection and the second metal interconnection, forming a magnetic tunneling junction (MTJ) on the SOT layer, forming a top electrode (TE) on the MTJ, and forming a cap layer on the MTJ and the SOT layer. Preferably, a bottom surface of the MTJ includes a first curve.
A method for fabricating a magnetoresistive random access memory (MRAM) device, comprising:
A magnetoresistive random access memory (MRAM) device, comprising:
Dependencies are inferred from the claim text.