Piezoelectric device and piezoelectric filter
AssigneeMurata Manufacturing Co., Ltd.
InventorYutaka KISHIMOTO
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AssigneeMurata Manufacturing Co., Ltd.
InventorYutaka KISHIMOTO
Estimating the term…
A piezoelectric device includes a piezoelectric layer including a thickness in a first direction, and upper and lower surfaces, a support on a side of the lower surface of the piezoelectric layer, an upper electrode on the upper surface of the piezoelectric layer, a lower electrode on the lower surface of the piezoelectric layer with at least a portion of the lower electrode facing the upper electrode, and a reinforcement film on at least one of the upper and lower surfaces of the piezoelectric layer. The support includes a space portion in a region overlapping with at least a portion of the upper and lower electrodes. In plan view seen in the first direction, the reinforcement film overlaps with at least a portion of a border between a region overlapping with the space portion and a region not overlapping with the space portion.
A piezoelectric device comprising:
Dependencies are inferred from the claim text.