Vibration device and method for manufacturing vibration device

Abstract

A vibration device includes: first and second substrates; an intermediate layer; and an excitation electrode. The first substrate includes a first surface. The second substrate includes a second surface facing the first surface. The intermediate layer is located between the first and second surfaces. The first surface includes a first recess. The intermediate layer includes a vibration portion and a frame portion. The vibration portion includes an excitation portion at which the excitation electrode is located. The excitation portion faces the first recess. The frame portion surrounds the vibration portion and is joined to the first and second surfaces. The frame portion includes a layer of the same material as included in the vibration portion. An entire periphery of an outer edge of the vibration portion is away from the frame portion. The vibration portion is joined to an outer peripheral region of the first recess on the first surface.

Dependencies are inferred from the claim text.