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US 2026/0074508 A1Published application
High power switched shunt capacitor architectures
AssigneeApplied Materials, Inc.
InventorsCHRISTOPHER OWEN, DAVID COUMOU
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Abstract
Embodiments described herein relate to an apparatus that includes a first trace, a capacitor electrically coupled to the first trace, and a balanced transformer electrically coupled to the capacitor. In an embodiment, a first transistor and a first diode are electrically coupled to a first inductor of the balanced transformer, and a second transistor and a second diode are electrically coupled to a second inductor of the balanced transformer.
Claims20
An apparatus, comprising:
- a first trace;
- a capacitor electrically coupled to the first trace;
- a balanced transformer electrically coupled to the capacitor;
- a first transistor and a first diode electrically coupled to a first inductor of the balanced transformer;
- and
- a second transistor and a second diode electrically coupled to a second inductor of the balanced transformer.
3 more elements
An apparatus, comprising:
- a board;
- a trace on the board, wherein the trace is electrically conductive;
- and
- a plurality of switched shunt capacitors electrically coupled to the trace, wherein the plurality of switched shunt capacitors comprise a plurality of different capacitance values, and wherein each of the plurality of switched shunt capacitors comprises:
- a capacitor;
- a transformer electrically coupled to the capacitor;
- and
- a transistor electrically coupled to the transformer, wherein the transistor has a bandgap that is 1.5 eV or higher.
5 more elements
An apparatus, comprising:
- a first impedance match stage, wherein the first impedance match stage comprises:
- a solid state varactor;
- and
- a first switched shunt capacitor bank that comprises a first plurality of individually controllable switched shunt capacitors;
- and
- a second impedance match stage that is electrically coupled to the first impedance match stage, wherein the second impedance match stage comprises a second switch shunt capacitor bank that comprises a second plurality of individually controllable switched shunt capacitors, and wherein each of the first plurality and the second plurality of individually controllable switched shunt capacitors comprises:
- a capacitor;
- a transformer electrically coupled to the capacitor;
- and
- a transistor electrically coupled to the transformer, wherein the transistor has a bandgap that is 1.5 eV or higher.
7 more elements
Dependencies are inferred from the claim text.