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US 2026/0074174 A1Published application
Retarding field energy analyzer with magnetic filter
AssigneeApplied Materials, Inc.
InventorsSUHAS UMESH, ANKE HELLMICH, AMIR BAYATI, CHRISTOPHER MALMS, LINDSAY HARDISON
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Abstract
Embodiments described herein relate to an apparatus that includes a housing with an opening, and a plurality of grids within the housing that are arranged in a vertical stack. In an embodiment, a collector plate is provided below the plurality of grids within the housing, and a magnetic module is adjacent to the opening.
Claims20
An apparatus, comprising:
- a housing with an opening;
- a plurality of grids within the housing that are arranged in a vertical stack;
- a collector plate below the plurality of grids within the housing;
- and
- a magnetic module adjacent to the opening.
2 more elements
An apparatus, comprising:
- a substrate;
- and
- a plurality of sensors spaced apart from each other on a surface of the substrate, wherein each of the plurality of sensors comprises:
- a housing with an opening;
- a plurality of grids within the housing that are arranged in a vertical stack;
- a collector plate below the plurality of grids within the housing;
- and
- a magnetic module adjacent to the opening.
5 more elements
An apparatus, comprising:
- a housing with an opening;
- a magnetic module adjacent to the opening;
- a first grid within the housing, wherein the first grid is configured to be held at a first voltage;
- a second grid within the housing, wherein the second grid is configured to be held at a second voltage;
- a third grid within the housing, wherein the third grid is configured to be held at a third voltage;
- a fourth grid within the housing, wherein the fourth grid is configured to be held at a fourth voltage;
- and
- a collector plate within the housing, wherein the collector plate is configured to be held at a fifth voltage.
5 more elements
Dependencies are inferred from the claim text.