Height measurements using focus line
AssigneeCarl Zeiss SMT GmbH
InventorsThomas KORB, Dmitry KLOCHKOV, Keumsil LEE
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Abstract
A method of operating a dual beam device comprises obtaining a milled sample having an assumed milled top surface shape which was obtained by milling the sample with a first ion beam of the dual beam device, and determining a plurality of height coordinates of the assumed milled top surface shape using a second beam of the dual beam device. The method also comprises determining at least one actual milling top surface shape for the milled sample based on the determined plurality of height coordinates, and determining a parameter of the sample based on the adapted milled top surface shape.
Claims20
A method, comprising:
- milling a sample using a first beam of a dual beam device to obtain a milled sample comprising a milled surface, the milled surface comprising an assumed surface shape, and the first beam comprising an ion beam;
- determining a plurality of height coordinates of the assumed surface shape of the milled surface;
- determining an actual surface shape of the milled surface based on the plurality of height coordinates;
- and
- determining a parameter of the sample based on the actual surface shape.
Dependencies are inferred from the claim text.