Scanning electron microscope (sem) image improvement method
AssigneeSamsung Electronics Co., Ltd.
InventorsDongeun Kim, Jinchoel Choi
Life of this patent
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Abstract
Provided is a scanning electron microscope (SEM) image improving method including obtaining a plurality of first SEM images by using the SEM, generating a plurality of second SEM images by removing noise from each of the first SEM images, aligning the plurality of second SEM images, and generating a third SEM image by combining the aligned plurality of second SEM images.
Claims20
A scanning electron microscope (SEM) image improvement method, the method comprising:
- obtaining a plurality of first SEM images by using the SEM;
- generating a plurality of second SEM images by removing noise from each of the plurality of first SEM images;
- aligning the plurality of second SEM images;
- and
- generating a third SEM image by combining the aligned plurality of second SEM images.
A scanning electron microscope (SEM) image improvement method, the method comprising:
- obtaining a plurality of first SEM images, each including one frame, by using the SEM;
- generating a plurality of second SEM images by removing noise from each of the plurality of first SEM images by using machine learning;
- aligning the plurality of second SEM images;
- and
- generating a third SEM image by combining the aligned plurality of second SEM images.
A scanning electron microscope (SEM) image improvement method, the method comprising:
- obtaining a first SEM image by using a semiconductor process resultant product as a target by using the SEM;
- generating a plurality of second SEM images by removing noise from each of the first SEM images by using machine learning;
- aligning the plurality of second SEM images;
- and
- generating a third SEM image by combining the aligned plurality of second SEM images.
Dependencies are inferred from the claim text.