Correction method, mold manufacturing method, imprint method, article manufacturing method, and information processing apparatus
AssigneeCanon Kabushiki Kaisha
InventorMASAYUKI KAGAWA
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Abstract
The present disclosure provides a correction method of correcting, by an information processing apparatus, design data of a pattern of a mold to be used in an imprint process of forming a pattern in an imprint material on a substrate, comprising: obtaining an actual volume of a concave pattern element formed in a test mold; determining a correction value for correcting a difference between the actual volume and a design volume of the pattern element by a dimension of the pattern element in a plane direction parallel to a surface of the test mold; and correcting the design data based on the correction value.
Claims14
A correction method of correcting, by an information processing apparatus, design data of a pattern of a mold to be used in an imprint process of forming a pattern in an imprint material on a substrate, comprising:
- obtaining an actual volume of a concave pattern element formed in a test mold;
- determining a correction value for correcting a difference between the actual volume and a design volume of the pattern element by a dimension of the pattern element in a plane direction parallel to a surface of the test mold;
- and
- correcting the design data based on the correction value.
An information processing apparatus that corrects design data of a pattern of a mold to be used in an imprint process of forming a pattern in an imprint material on a substrate, wherein the apparatus is configured to:
- obtain an actual volume of a concave pattern element formed in a test mold;
- determine a correction value for correcting a difference between the actual volume and a design volume of the pattern element by a dimension of the pattern element in a plane direction parallel to a surface of the test mold;
- and
- correct the design data based on the correction value.
Dependencies are inferred from the claim text.