Memory Circuitry and Method Used in Forming Memory Circuitry
AssigneeMicron Technology, Inc.
InventorsJiewei Chen, Jordan D. Greenlee, Shuangqiang Luo, Silvia Borsari
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AssigneeMicron Technology, Inc.
InventorsJiewei Chen, Jordan D. Greenlee, Shuangqiang Luo, Silvia Borsari
Estimating the term…
Memory circuitry comprising strings of memory cells comprises a stack comprising vertically-alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers in a memory-array region. The insulative tiers and the conductive tiers extend from the memory-array region into a stair-step region. The stair-step region comprises a cavity comprising a flight of stairs having insulative material atop treads of the stairs. Individual of the treads comprise conducting material of one of the conductive tiers. Conductive vias extend through the insulative material. Individual of the conductive vias are directly above and directly against the conducting material of the respective individual tread. A lining is over sidewalls of the individual conductive vias. The lining has a bottom. The individual conductive vias are directly under the bottom of the lining directly above the conducting material of the respective individual tread. Other embodiments, including method, are disclosed.
Memory circuitry comprising strings of memory cells, comprising:
Memory circuitry comprising strings of memory cells, comprising:
Dependencies are inferred from the claim text.