Signal-to-noise metric for annotation guidance, dl model tunability, and robustness
AssigneeKLA Corporation
InventorsAbhishek Tiwari, Hedong Yang, Xu Zhang, Li He, Rajasekhar Kuppa, Surajit Mondal
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AssigneeKLA Corporation
InventorsAbhishek Tiwari, Hedong Yang, Xu Zhang, Li He, Rajasekhar Kuppa, Surajit Mondal
Estimating the term…
Methods and systems for determining a signal-to-noise metric for locations of interest on a specimen are provided. One or more statistics of non-defect signals from background patch images in a test image that are similar to a patch image of a location of interest in the test image are determined. The background patch images are found by searching a reference image for patch images that are similar to the location of interest patch image and finding the corresponding patch images in the test image. The signal of the location of interest in the test image and the one or more statistics are used to determine a signal-to-noise metric for the location of interest. The signal-to-noise metric can be used in applications such as defect annotation, deep learning (DL) model tunability, DL model repeatability, and novel defect detection.
A system configured for determining a signal-to-noise metric for locations of interest on a specimen, comprising:
A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for determining a signal-to-noise metric for locations of interest on a specimen, wherein the computer-implemented method comprises:
A computer-implemented method for determining a signal-to-noise metric for locations of interest on a specimen, comprising:
Dependencies are inferred from the claim text.