Image freezing for pcb and semiconductor inspection

Abstract

The system includes a light source, a stage, a camera, and a mirror. The light source is configured to emit light. The stage is configured to support a workpiece and is movable to scan the light across the workpiece disposed on the stage. The camera is configured to receive reflected light from the workpiece and capture an image of the workpiece based on the reflected light received within an exposure time. The mirror is configured to direct the reflected light to the camera and rotate at a constant velocity that is synchronized with a velocity of the stage and the exposure time of the camera.

Dependencies are inferred from the claim text.