Flow rate adjusting device, flow rate adjusting system, and control method of flow rate adjusting device

A flow rate adjusting system comprising:

• a flow rate adjusting device;
• and a higher-level device configured to control the flow rate adjusting device,
• wherein the flow rate adjusting device comprises:
• a flow metering portion configured to measure a flow rate of a liquid flowing through a measurement flow channel;
• a flow rate adjusting portion configured to move a valve body along an axis in a direction closer to or away from a valve hole to adjust a flow rate of a liquid flowing out of the measurement flow channel;
• a flow rate setting unit configured to set a set flow rate value of a liquid to be adjusted by the flow rate adjusting portion;
• and
• a control unit configured to control the flow rate adjusting portion in either a flow rate adjusting mode or a standby mode,
• wherein the control unit
• when performing the flow rate adjusting mode, controls the flow rate adjusting portion to move the valve body to a target position that varies in accordance with a flow rate difference between a measured flow rate value of a liquid measured by the flow metering portion and the set flow rate value so that the measured flow rate value matches the set flow rate value, and
• when performing the standby mode, controls the flow rate adjusting portion to move the valve body to a standby position and then maintain the standby position, the valve body being not in contact with the valve hole at the standby position,
• wherein the higher-level device comprises:
• a mode transfer unit configured to transfer a first switching signal and a second switching signal to the flow rate adjusting device, the first switching signal being for switching the flow rate adjusting device from the standby mode to the flow rate adjusting mode, and the second switching signal being for switching the flow rate adjusting device from the flow rate adjusting mode to the standby mode;
• a flow rate transfer unit configured transfer a flow rate setting signal to the flow rate adjusting device, the flow rate setting signal being for setting the set flow rate value;
• and
• a standby position transfer unit configured to transfer a standby position setting signal to the flow rate adjusting device, the standby position setting signal being for setting the standby position, and
• wherein the standby position transfer unit transfers the standby position setting signal to the flow rate adjusting device so that the standby position in a predetermined standby mode varies in accordance with the set flow rate value in the flow rate adjusting mode performed subsequent to the predetermined standby mode.

A control method of a flow rate adjusting device, wherein the flow rate adjusting device comprises

• a flow metering portion configured to measure a flow rate of a liquid flowing through a measurement flow channel,
• a flow rate adjusting portion configured to move a valve body along an axis in a direction closer to or away from a valve hole to adjust a flow rate of a liquid flowing out of the measurement flow channel, and
• a flow rate setting unit configured to set a set flow rate value of a liquid to be adjusted by the flow rate adjusting portion,
• the control method comprising:
• a flow rate adjusting step of controlling the flow rate adjusting portion to move the valve body to a target position that varies in accordance with a flow rate difference between a measured flow rate value of a liquid measured by the flow metering portion and the set flow rate value so that the measured flow rate value matches the set flow rate value;
• and
• a standby step of controlling the flow rate adjusting portion to move the valve body to a standby position and then maintain the standby position, the valve body being not in contact with the valve hole at the standby position.