Euv mask particle removing methods and systems

A method for removing contaminant particles on a surface of a mask, comprising:

• collecting an image of the mask with the contaminant particles on the surface of the mask;
• providing the image of the mask with the contaminant particles to an artificial intelligence engine;
• determining, by the artificial intelligence engine, a type of the contaminant particles based on the image of the mask;
• and
• performing a particle-removing process corresponding to the type of the contaminant particles on the surface of the mask.

An apparatus for removing contaminant particles on a surface of a mask, comprising:

• a processor;
• and a non-transitory computer readable storage medium storing a program, wherein the processor is programmed to:
• a) collect an image of the mask with the contaminant particles on the surface of the mask;
• b) determine a type of the contaminant particles based on the image of the mask;
• c) control a particle-removing process corresponding to the type of the contaminant particles on the surface of the mask;
• d) determine if the contaminant particles are removed from the surface of the mask by the particle-removing process;
• and
• e) associate the particle-removing process with the type of the contaminant particles when the contaminant particles are removed from the surface of the mask by the particle-removing process.