Object table, stage apparatus, holding method and lithographic apparatus
AssigneeASML Netherlands B.V.
InventorsMichael Marinus Anna STEUR, Bas JANSEN, Andre Bernardus JEUNINK, Johannes Adrianus Cornelis Maria PIJNENBURG
Life of this patent
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Abstract
An object table including: a holding surface for holding an object; and an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface, wherein the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface.
Claims21
-20. (canceled)
An object table comprising:
- a holding surface configured to hold an object;
- and
- an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface, wherein the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface, wherein the detaching and re-attaching is performed in a sequence propagating in a direction from an interior location of the object toward an edge of the object.
A non-transitory computer-readable medium comprising instructions therein, the instructions, when executed by a computer system, are configured to cause the apparatus to:
- exert a holding force on an object for holding the object to a holding surface;
- and
- decrease a strain in the object caused by the holding force by sequential detachment and re-attachment of portions of the object from the holding surface, while the object is held to the holding surface, wherein the detachment and re-attachment is performed in a sequence propagating in a direction from an interior location of the object toward an edge of the object.
An object table comprising:
- a base structure;
- a plurality of burls protruding from the base structure, and wherein a holding surface configured to hold an object comprises end surfaces of the plurality of burls;
- and
- an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface, wherein the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface, wherein the sequentially detaching and re-attaching comprises moving an end surface of at least one of the burls away from the object.
Dependencies are inferred from the claim text.