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US 2026/0064008 A1Published application
Adaptive optical module
AssigneeCarl Zeiss SMT GmbH
InventorsStefan BAUEREGGER, Markus RAAB, Matthias MANGER, Axel WITT
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AssigneeCarl Zeiss SMT GmbH
InventorsStefan BAUEREGGER, Markus RAAB, Matthias MANGER, Axel WITT
Estimating the term…
An adaptive optical module has at least one actuator for altering a shape of an optical surface of the optical module. The actuator comprises: a dielectric medium, which is deformable via an electric field, and electrodes for generating the electric field in the dielectric medium by applying an electrical working voltage. The adaptive optical module further comprises a measuring device that measures an impedance present at different values of the working voltage between the electrodes depending on a frequency of an AC voltage applied to the electrodes for measurement purposes, and an evaluation device configured to ascertain from the measured impedance approximately a respective gradient value of characteristic curves each representing a capacitance of the actuator depending on the frequency for the different values of the working voltage and to determine therefrom a deflection of the actuator at at least one operating point of the working voltage.
An adaptive optical module, comprising:
A method of ascertaining a deflection of an actuator of an adaptive optical module, the actuator being configured to alter a shape of an optical surface of the optical module, the actuator comprising a dielectric medium which is deformable via an electric field, and electrodes configured to generate the electric field in the dielectric medium by applying an electrical working voltage, the method comprising:
Dependencies are inferred from the claim text.