Method for manufacturing member with recess structure and member with recess structure

A method for manufacturing a member with a recess structure, comprising:

• (1) a step of placing a catalytic material in a first area on a first surface of an object to be processed, in which
• the first surface is made of an element of which a boiling point of a fluoride is 550° C. or lower,
• the catalytic material contains an organic compound containing a polar functional group, and
• the catalytic material includes, in a cross-sectional view of the catalytic material, i.e., in cross section perpendicular to the first surface, a first side surface having a first height H1 and a second side surface having a second height H2, the first and second side surfaces being opposed to each other, in which H1>0 μm, H2>0 μm, and the height H1 is higher than the height H2:
• (2) a step of irradiating the catalytic material with irradiation light containing deep ultraviolet light having a wavelength of 380 nm or shorter;
• and
• (3) a step of exposing the object to be processed to a fluorine-containing gas at 80° C. or higher, wherein
• a recess structure is formed below the first area after the step (3), and the recess structure has, in the cross-sectional view, at a center of the first area, a shape inclined toward the second side surface from a perpendicular line dropped from the first surface.