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US 2026/0063992 A1Published application
Semiconductor photoresist composition and method of forming patterns using the composition
AssigneeSamsung SDI Co., Ltd.
InventorsKyungmog KIM, Miyeon HAN, Joonhee HAN, Dong Wan RYU, Sangkyun IM
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Abstract
A semiconductor photoresist composition and a method of forming patterns using the semiconductor photoresist composition are provided. The semiconductor photoresist composition includes: an organometallic compound; a compound represented by Chemical Formula 1; and a solvent.
Claims13
A semiconductor photoresist composition, comprising:
- an organometallic compound;
- a compound represented by Chemical Formula 1;
- and
- a solvent:
- wherein, in Chemical Formula 1,
- R1 is hydrogen, a hydroxyl group, a thiol group, a carboxyl group, a guanidyl group, an amide group, an amino group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C6 to C20 arylamine group, a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C6 to C20 aryl group, a substituted or unsubstituted C2 to C20 heteroaryl group, or a combination thereof,
- R2 to R4 are each independently hydrogen, a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C6 to C20 aryl group, a substituted or unsubstituted C7 to C20 arylalkyl group, or a combination thereof, and
- L1 is a single bond or a substituted or unsubstituted C1 to C10 alkylene group.
5 more elements
Dependencies are inferred from the claim text.