Lithium niobate on insulator (lnoi) vertically tapered optical waveguide and method of forming the same

Abstract

A lithium niobate on insulator (LNOI) optical waveguide including a first region, a second region, and a third region, a substrate layer extending across the first region, the second region, and the third region, and a first cladding layer disposed on the substrate layer across the first region, the second region, and the third region. The LNOI optical waveguide further includes a lithium niobate (LN) layer disposed on the first cladding layer across the first region and the second region. The LN layer has a planar surface in the first region and a vertically tapered surface in the second region, and a dielectric strip in contact with the LN layer across the first region and the second region, and in contact with the first cladding layer across the third region.

Dependencies are inferred from the claim text.