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US 2026/0063892 A1Published application
Continuously adjustable resonance frequency scanning 1d mirror
OwnerTal Goichman, Arkady Bronfman +2inventors
InventorsTal Goichman, Arkady Bronfman, Ashkan Aghajani, Mordechai Hai Hababo
Life of this patent
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Abstract
The system includes a support member configured to support a mirror, a fulcrum configured to centrally support the support member, and a base configured to support the fulcrum. A voice coil is disposed on the base member on one side of the fulcrum and connected to one end of the support member. A processor is configured to send an excitation signal to the voice coil, which causes the support member to oscillate relative to the fulcrum.
Claims20
A system comprising:
- a support member configured to support a mirror;
- a fulcrum configured to centrally support the support member;
- a base member configured to support the fulcrum;
- a voice coil disposed on the base member on one side of the fulcrum and connected to one end of the support member;
- and
- a processor configured to send an excitation signal to the voice coil, which causes the support member to oscillate relative to the fulcrum.
3 more elements
A method comprising:
- emitting light from a light source onto a workpiece;
- moving a stage supporting the workpiece to scan the light emitted by the light source across the workpiece, wherein the stage is moved at a linear velocity;
- applying an excitation signal to a voice coil disposed on a base member of a mirror assembly on one side of a fulcrum, wherein the fulcrum centrally supports a support member supporting a mirror, and the excitation signal causes the voice coil to oscillate the support member relative to the fulcrum at an angular velocity synchronized with the linear velocity of the stage;
- and
- capturing at least one image of the workpiece with a camera based on the light reflected by the workpiece, wherein the mirror is configured to direct the light reflected by the workpiece toward the camera.
2 more elements
Dependencies are inferred from the claim text.