Silicon photonic semiconductor device and manufacturing method thereof

Abstract

A silicon photonic semiconductor device includes a modulator and a heater. The modulator includes a bus waveguide and a silicon ring. The silicon ring is optically coupled to the bus waveguide, and the heater is configured to heat the silicon ring. The heater includes a first silicon thermal resistance region and a second silicon thermal resistance region. The first silicon thermal resistance region is disposed on an outer ring portion of the silicon ring, and the outer ring portion has a first conductivity type doping. The second silicon thermal resistance region is disposed on an inner ring portion of the silicon ring and the inner ring portion has a second conductivity type dopant. The first conductivity type dopant and the second conductivity type dopant have different electrical properties.

Dependencies are inferred from the claim text.