Workpiece with a hollow structure, method for at least partially forming a hollow structure, mirror, and lithography system

Abstract

A workpiece having: at least one hollow structure (27) which runs in the workpiece (25) and configured to receive a flowing fluid (28) therein. The hollow structure has a first section and a second, adjacent section, which are mutually oriented at an angle (γ) of between 60° and 120°. The hollow structure has a rounded-off section (37a, 37b), at which the first section and the second section merge into one another. A surface of a wall of the hollow structure in the first section, in the second section and/or in the rounded-off section has a roughness Ra of 25 μm or less. Also, a method for at least partly forming a hollow structure in a workpiece by selective laser-induced etching, an associated mirror (24), and an associated reflective coating (26), applied to a surface (25a) of the substrate.

Dependencies are inferred from the claim text.