Inspection method of a semiconductor device and the inspection program of the semiconductor device

A non-transitory computer-readable media storing a program causing a computer to implement:

• inspecting a semiconductor device that is included in a sample placed on a stage of an inspection apparatus for the semiconductor device,
• wherein the stage includes a temperature adjustment unit, the temperature adjustment unit includes a plurality of temperature adjustment elements, the plurality of temperature adjustment elements are arranged in a plane parallel to a stage surface of the stage where the sample is placed, and a size of each of the plurality of temperature adjustment elements is smaller than or equal to a size of the semiconductor device in a plain view.