Apparatus for measuring static electricity

An apparatus for measuring a static electricity, comprising:

• a first probe spaced apart from a first surface of a measurement object by a first distance;
• and
• a second probe spaced apart from a second surface by a second distance, the second surface opposing the first surface in a thickness direction of the measurement object,
• wherein the first probe includes:
• a first casing;
• and
• a first electrostatic measurement structure provided in the first casing to measure a static electricity of a first measurement region included in the first surface,
• wherein the first distance and the second distance are smaller than a thickness of the measurement object,
• wherein the first casing is earthed to a ground,
• wherein the first electrostatic measurement structure is earthed to the ground separately from the first casing,
• wherein the first casing includes a first measuring hole which faces the first surface and corresponds to the first measurement region,
• wherein the first casing includes a metal or an electrostatic dissipative material,
• wherein the second probe is earthed to the ground and includes a metal or an electrostatic dissipative material,
• wherein the second probe includes an electrostatic field separation face that faces the second surface, and
• wherein the electrostatic field separation face has a size equal to or larger than a size of the first measuring hole.

An apparatus for measuring a static electricity, comprising:

• a first probe spaced apart from a first surface of a measurement object by a first distance;
• and
• a second probe spaced apart from a second surface by a second distance, the second surface opposing the first surface in a thickness direction of the measurement object,
• wherein the first probe includes:
• a first casing;
• and
• a first electrostatic measurement structure provided in the first casing and configured to measure a static electricity of a first measurement region included in the first surface,
• wherein the second probe includes:
• a second casing;
• and
• a second electrostatic measurement structure provided in the second casing and configured to measure a static electricity of a second measurement region included in the second surface,
• wherein the first distance and the second distance are smaller than a thickness of the measurement object,
• wherein each of the first casing and the second casing are earthed to a ground,
• wherein the first electrostatic measurement structure is earthed to the ground separately from the first casing,
• wherein the second electrostatic measurement structure is earthed to the ground separately from the second casing,
• wherein the first casing includes a first measuring hole which faces the first surface and corresponds to the first measurement region,
• wherein the second casing includes a second measuring hole that faces the second surface to corresponds to the second measurement region, and
• wherein each of the first casing and the second casing includes a metal or electrostatic dissipative material.