Substrate inspection apparatus, substrate processing system including the same, and substrate inspection method using the same

A substrate inspection method, comprising:

• preparing a substrate including a center region and an edge region enclosing the center region;
• emitting at least one light toward the edge region of the substrate;
• detecting at least one diffraction pattern based on the at least one light that is emitted toward the edge region of the substrate;
• and
• analyzing the at least one diffraction pattern that is detected,
• wherein the emitting the at least one light comprises generating at least one diffraction light, and
• wherein the at least one diffraction pattern is produced by the at least one diffraction light.

A substrate processing system, comprising:

• an interface module comprising an aligner that is configured to align a substrate;
• and
• a substrate processor connected to the interface module,
• wherein the substrate comprises a center region and an edge region enclosing the center region,
• wherein the aligner comprises:
• a supporter configured to rotate the substrate;
• an alignment detector configured to detect a notch of the substrate;
• and
• a substrate inspector configured to inspect the edge region of the substrate, and
• wherein the substrate inspector is configured to detect a defect on the edge region based on at least one diffraction pattern.