Strain gauge, strain measurement device, and strain measurement method

Abstract

To provide a strain gauge that can achieve improvement of practicality. A nano-granular structure film constituting a resistor 2 formed on one main surface of a substrate 1 of a strain gauge has a composition represented by a general formula L100-a-b-cMaFbOc (L is one or more metal elements selected from Fe, Co, Ni, Pt, Au, Ag, and Cu; M is one or more elements selected from Li, Mg, Al, Ca, Sr, Ba, Gd, and Y: F is fluorine: O is oxygen; and 40.0≤(a+b+c)≤63.0). The resistor 2 is constituted of a nano-granular structure film in which metal particles Q1 represented by L and having an average particle diameter of 1.0 to 5.0 nm are distributed in an insulating matrix Q2 formed of a fluoride of M or a fluoride and an oxide of M.

Dependencies are inferred from the claim text.