Probe supports, probe assemblies that include the probe supports, probe systems that include the probe assemblies, and related methods

Abstract

Probe supports, probe assemblies that include the probe supports, probe systems that include the probe assemblies, and related methods. The probe assemblies include the probe support, a probe support mounting structure, and a probe. The probe support may include an elongate support body that extends between a support mount and a probe mount. The probe support also may include a deformation measurement structure configured to generate a deformation output indicative of deformation of the elongate support body. The probe support mounting structure may be operatively attached to the support mount. The probe may be operatively attached to the probe mount. The probe systems include a chuck, a signal generation and analysis assembly, and the probe assembly. The methods control the operation of a probe system based, at least in part, on a deformation output.

Dependencies are inferred from the claim text.