Fluid systems, semiconductor processing systems including fluid systems, flow control methods and related computer program products

A flow control method, comprising:

• at a fluid system including a conduit, a concentration sensor coupled to the conduit, and a processor disposed in communication with the concentration sensor and responsive to instructions recorded on a memory,
• receiving, at the processor, a concentration control selection;
• receiving, at the processor, a signal indicative of concentration of a fluid constituent entrained in a fluid constituent-carrier in a fluid conveyed by the conduit;
• determining, using the processor, a concentration of the fluid constituent;
• and
• controlling the concentration of the fluid constituent conveyed by the conduit by throttling one of (a) mass flow rate of the fluid, (b) pressure of the fluid constituent-carrier, and (c) the mass flow rate of the fluid and the pressure of the fluid constituent-carrier based on the concentration control selection when the determined concentration differs from a predetermined concentration value by more than a predetermined concentration differential.

A computer program product, comprising:

• a non-transitory machine-readable medium having a plurality of program modules recorded thereon that, when read by a processor, cause the processor to:
• receive a concentration control selection;
• receive, at the processor, a signal indicative of concentration of a fluid constituent entrained in a fluid constituent-carrier in a fluid conveyed by a conduit from a concentration sensor coupled to the conduit and disposed in communication with the concentration sensor;
• determine concentration of the fluid constituent;
• and
• control the concentration of the fluid constituent conveyed by the conduit by throttling one of (a) mass flow rate of the fluid, (b) pressure of the fluid constituent-carrier, and (c) the mass flow rate of the fluid and the pressure of the fluid constituent-carrier based on the concentration control selection when the concentration differs from a predetermined concentration value by more than a predetermined concentration differential.